Hofer diaphragm compressors for silanes

Silane is an intermediate product of high-purity silicon, which, for example, is used for the manufacturing of microchips. This toxic and spontaneously combustible gas must not escape into the atmosphere, thus the compressor has to operate leak-free.

Since Hofer diaphragm compressors are hermetically sealed, they are the best choice for this purpose. In order to prevent leaks at the peripheral equipment, we provide a welded version of the entire piping system, including valves and instruments.

All gas-wetted parts are made of special alloys in order to ensure a long service life of this application.


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